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Ultra-Low Specific On-Resistance Trench SOI LDMOS with a Floating Lateral Field Plate

Yang, D; Hu, SD; Huang, Y; Jiang, YY; Cheng, K; Yuan, Q; Lei, JM; Lin, Z; Zhou, XC; Tang, F

Yang, D (reprint author), Chongqing Univ, Coll Commun Engn, Chongqing Engn Lab High Performance Integrated Ci, Chongqing, Peoples R China.

IETE TECHNICAL REVIEW, 2018; 35 (4): 342

Abstract

An ultra-low specific on-resistance (R-on,R-sp) trench silicon-on-insulator (SOI) LDMOS is proposed in this paper. In this novel structure, a floating......

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